MEMS Fabry-Perot Interferometer Based Spectral Sensors for Industrial Applications

Anna Rissanen; Claudio Avila; Bin Guo; Uula Kantojärvi; Matti Tammi; Richard Bourne; Frans Muller

doi:10.1364/AIO.2017.ATu1A.1

Applied Industrial Optics: Spectroscopy, Imaging and Metrology 2017

San Francisco, California United States
26–29 June 2017
ISBN: 978-1-943580-29-3

From the session
Fabulous-Perot Sensing and Sources (ATu1A)

MEMS Fabry-Perot Interferometer Based Spectral Sensors for Industrial Applications

Anna Rissanen, Claudio Avila, Bin Guo, Uula Kantojärvi, Matti Tammi, Richard Bourne, and Frans Muller

Imaging and Applied Optics 2017 (3D, AIO, COSI, IS, MATH, pcAOP)
OSA Technical Digest (online) (Optical Society of America, 2017),
paper ATu1A.1
•https://doi.org/10.1364/AIO.2017.ATu1A.1

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A. Rissanen, C. Avila, B. Guo, U. Kantojärvi, M. Tammi, R. Bourne, and F. Muller, "MEMS Fabry-Perot Interferometer Based Spectral Sensors for Industrial Applications," in Imaging and Applied Optics 2017 (3D, AIO, COSI, IS, MATH, pcAOP), OSA Technical Digest (online) (Optical Society of America, 2017), paper ATu1A.1.

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Related Topics
Optics & Photonics Topics
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The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Fabry-Perot (120.2230)
- Sensors (130.6010)
- Optical microelectromechanical devices (230.4685)

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Abstract

This presentation gives an overview of recent advances in the 1^st- and 2^nd generation MEMS FPI processes for near- and mid- infrared (NIR-MIR) wavelength sensing applications for automotive- and process industry.

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Abstract

Applied Industrial Optics: Spectroscopy, Imaging and Metrology 2017

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