Surface Metrology using an Elastomeric Sensor

Micah K. Johnson; Edward H. Adelson

doi:10.1364/AIO.2011.AITuB4

Imaging and Applied Optics
OSA Technical Digest (CD) (Optica Publishing Group, 2011),
paper AITuB4
•https://doi.org/10.1364/AIO.2011.AITuB4

Surface Metrology using an Elastomeric Sensor

Micah K. Johnson and Edward H. Adelson

Applied Industrial Optics: Spectroscopy, Imaging and Metrology 2011

Toronto Canada
10–14 July 2011
ISBN: 978-1-55752-914-5

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Optical Metrology (AITuB)

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M. K. Johnson and E. H. Adelson, "Surface Metrology using an Elastomeric Sensor," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optica Publishing Group, 2011), paper AITuB4.

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Abstract

We describe a method for measuring microscopic surface topography using an elastomeric sensor combined with machine vision. The system is fast, low-cost, and offers micron-scale resolution.

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