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Compact athermal silicon Mach-Zehnder interferometer based on bi-level taper

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Abstract

We present a novel compact and temperature insensitive Mach-Zehnder interferometer based on bi-level taper and a multimode waveguide. The wavelength thermal dependence of the device is around 15pm/°C in the wavelength range of 50nm.

© 2021 The Author(s)

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