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Performance of a Pre-amorphized Traveling-wave Silicon Optical Modulator

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Abstract

In this paper, a pre-amorphized silicon traveling-wave Mach-Zehnder modulator is compared with a non-pre-amorphized sample and shown to have 1.83 × greater modulation bandwidth with 1.66 × lower energy-per-bit at 1.20 × higher speed for error- free operation.

© 2021 The Author(s)

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