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Conferences > ACPC > 2019 > M4A > M4A.294
  • Asia Communications and Photonics Conference (ACPC) 2019
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper M4A.294

Fano resonance in deuterated silicon nitride based on Fabry-Perot cavity coupled microring resonator

Zihan Xu, Zeru Wu, Yujie Chen, Shuailong Zhang, Lin Liu, Lidan Zhou, Chunchuan Yang, Yanfeng Zhang, and Siyuan Yu

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Abstract

We demonstrate Fano resonance in shallow-etching grating-based Fabry-Perot (FP) cavity coupled microring resonator on a deuterated silicon nitride platform. The measured maximal slope rate (SR) of single Fano resonance is 1542.2 dB/nm. The results are important for many different photonics applications.

© 2019 The Author(s)

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