We demonstrate PECVD based silicon nitride materials for range of applications. These applications are for non-linear functionalities in the C band, coarse wavelength division multiplexing in the O band and a 1-micron thick SiN waveguiding platform at 2 microns demonstrating filters and trimming capabilities.

© 2019 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription