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Conferences > ACPC > 2016 > AF3F > AF3F.4

Hybrid integrated velocity matched travelling-wave InP/InGaAs photodetectors with silicon nitride waveguides

Pengfei Xu, Yujie Chen, Zengkai Shao, Yanfeng Zhang, Tianyou Zhang, Zeru Wu, Chunchuan Yang, Lin Liu, Lidan Zhou, Hui Chen, Jie Liu, and Siyuan Yu

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Abstract

Broad-bandwidth high-responsivity waveguide integrated photodetectors are key optoelectronic devices for on-chip photoelectric conversion and radio frequency (RF) signal demodulations. Here, a hybrid integrated InP/InGaAs travelling-wave photodetector based on slotline transmission line with velocity-matched bent silicon nitride (SiNx) optical waveguide is studied. Besides, the fabrication of the hybrid integrated TWPD device is demonstrated.

© 2016 Optical Society of America

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