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Quantum efficiency enhanced InGaAs/InP photodetector with polarization insensitive subwavelength gratings

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Abstract

A polarization insensitive periodical subwavelength grating and a photodetector incorporating this grating were proposed and fabricated. The quantum efficiency of the photodetector was improved 50% by incorporating an achieved grating with more than 80% reflectivity.

© 2015 Optical Society of America

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