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Conferences > ACPC > 2013 > AF2B > AF2B.43

Structural and optical properties of β-Ga2O3 thin films on sapphire

Zhenping Wu, Peigang Li, and Weihua TANG

Open Access Open Access

Abstract

We have successfully fabricated epitaxial β-Ga2O3 thin films on sapphire substrates. The RHEED observations have revealed that a layer-by-layer growth of Ga2O3 was achieved at optimized deposition conditions. The optical properties of the films were derived from measurements, at normal incidence, of transmittance and reflectance.

© 2013 Optical Society of America

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