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Conferences > ACPC > 2012 > ATh3B > ATh3B.2

Waveguide Grating coupler based on CMOS poly-silicon gate layer

Chao Qiu, Zhen Sheng, Le Li, Albert Pang, Aimin Wu, Xi Wang, Shichang Zou, and Fuwan Gan

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Abstract

Grating couplers based on CMOS poly-silicon gate layer are experimentally demonstrated with coupling efficiency of ~40%. By adding full-etched trenches in the waveguide layer, the coupling efficiency can be further improved to ~70%.

© 2012 Optical Society of America

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