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Conferences > ACPC > 2012 > AS4B > AS4B.3

Design and fabrication of low-refractive-index polymeric photonic crystal nanobeam structures

Zi-Ming Meng, Yi-Hua Hu, and Zhi-Yuan Li

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Abstract

The design of high-Q polymeric photonic crystal nanobeam microcavities is studied based on the three-dimensional finite-difference time-domain method. Experimentally the fabrication method of air-bridged polymeric photonic crystal nanobeam structures is presented using focused ion beam etching and wet chemical etching.

© 2012 Optical Society of America

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