Hydrogenated amorphous silicon-germanium (a-SiGe:H) alloy thin films were fabricated by conventional radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) with a gas mixture of silane (SiH4) and germane (GeH4). The structural, optical and electrical properties of the films with different gas volume fraction of germane were investigated by Raman and Fourier transform infrared (FTIR) spectroscopy, ultraviolet and visible (UV-vis) spectroscopy and I-V curves, respectively. The amorphous network and structural disorder in the a-SiGe:H thin films were evaluated by Raman spectroscopy. Meanwhile, the Si-H and Ge-H configurations of the films were investigated by FTIR spectroscopy. From UV-vis spectroscopy and I-V curves, the optical and electrical properties of the testing films could be deduced with varied germanium. It can be concluded that the structural and photoelectronic properties of a-SiGe:H thin films can be influenced apparently by varing of GeH4/(SiH4+ GeH4) ratio in PECVD process.

© 2011 Optical Society of America

PDF Article
More Like This
Structural evolution and electronic properties of n-type doped hydrogenated amorphous silicon thin films

Jian He, Wei Li, Rui Xu, Kang-Cheng Qi, and Ya-Dong Jiang
831206 Asia Communications and Photonics Conference and Exhibition (ACP) 2011

Influence of Gas Partial Pressure on the Optoelectronic and Structural Properties of Si, SiC and SiGe Films by PECVD

William W. Hernández-Montero and Carlos Zúñiga-Islas
JW4A.43 Fourier Transform Spectroscopy (FTS) 2016

Tailoring the Optical Properties of Boron Doped μc-Si:H Thin Films by Changing the SiH4/H2 Ratio Using RF-PECVD Process

Ghada Dushaq, Ammar Nayfeh, and Mahmoud Rasras
FTu3F.2 Frontiers in Optics (FiO) 2016


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription