Abstract
We present some novel periodic structures with different internal nanopatterns based on multi-exposure two-beam interference lithography. Two-dimensional quasi-crystal structures are fabricated with precisely control of exposure directions and doses as well as the total number of exposures. Experimental fabrication of microstructures are demonstrated and comparied with numerical simulations of intensity distributions. The size of the fabricated samples is around 1 square centimeter. The diffraction spectra of the fabricated samples are measured and tested. The experiment results show such a fabrication technology is very promising for making diverse large-area microstructures with complex internal nanopatterns.
© 2010 Optical Society of America
PDF ArticleMore Like This
Julian Hauss, Boris Riedel, Tobias Bocksrocker, Sebastian Gleiss, Klaus Huska, Ulf Geyer, Uli Lemmer, and Martina Gerken
SOThB2 Solid-State and Organic Lighting (SOLED) 2010
Justin L. Stay, Andrew T. Heidt, and Thomas K. Gaylord
JSuA5 Frontiers in Optics (FiO) 2008
Guy M. Burrow and Thomas K. Gaylord
FWS3 Frontiers in Optics (FiO) 2010