Abstract

The photoluminescence (PL) spectra at room temperature for the Si-based samples doped by Nd,O+are measured. All the samples possess blue-violet PL properties and light-emission is stable. The PL spectra has multiple peak structure. The intensity of PL spectra is relative to Nd and O+implantation and the annealing temperature.

© OSA, IEEE Photonics Society, SPIE, COS, CIC

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