Abstract

We report the fabrication and measurement of silicon-wires and multi-mode interference splitters based on silicon-wires structures. The low propagation loss of 0.71±0.03dB/mm and bending loss of 0.01dB/90owere obtained for silicon-wires. The splitting-ratios of the splitters are respectively 50:50, 15:85, and 28:72. They exhibited low excess loss and exact splitting-ratios.

© OSA, IEEE Photonics Society, SPIE, COS, CIC

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