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Light Extraction Analysis of AlGaInP based LED with Surface Texture

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Abstract

Regular, periodic arranged structures were fabricated on p-side-up AlGaInP LEDs through dry etching. The dimension of the structures was optimized by Monte Carlo ray tracing simulation. Due to the appearance of an additional escape cone for light extraction enabled by surface structures, it significantly improves the performance of the chip.

© 2009 OSA, IEEE Photonics Society, SPIE, COS, CIC

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