Abstract
Diffraction by a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory. The analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths. Example results for a wide range of groove depths are presented for sinusoidal, square-wave, triangular, and sawtooth gratings. Diffraction efficiencies obtained from the present method of analysis are compared with previously published numerical results. To obtain large diffraction efficiencies (greater than 85%) for gratings with typical substrate permittivities, it is shown that the grating profile should possess even symmetry.
© 1982 Optical Society of America
Full Article | PDF ArticleCorrections
M. G. Moharam and T. K. Gaylord, "Diffraction analysis of dielectric surface-relief gratings: erratum," J. Opt. Soc. Am. 73, 411-411 (1983)https://opg.optica.org/josa/abstract.cfm?uri=josa-73-3-411
More Like This
Masahiro Abe and Masanori Koshiba
J. Opt. Soc. Am. A 11(7) 2038-2044 (1994)
Kiyoshi Yokomori
Appl. Opt. 23(14) 2303-2310 (1984)
M. G. Moharam, T. K. Gaylord, G. T. Sincerbox, H. Werlich, and B. Yung
Appl. Opt. 23(18) 3214-3220 (1984)