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Diffraction analysis of dielectric surface-relief gratings

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Abstract

Diffraction by a dielectric surface-relief grating is analyzed using rigorous coupled-wave theory. The analysis applies to arbitrary grating profiles, groove depths, angles of incidence, and wavelengths. Example results for a wide range of groove depths are presented for sinusoidal, square-wave, triangular, and sawtooth gratings. Diffraction efficiencies obtained from the present method of analysis are compared with previously published numerical results. To obtain large diffraction efficiencies (greater than 85%) for gratings with typical substrate permittivities, it is shown that the grating profile should possess even symmetry.

© 1982 Optical Society of America

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Corrections

M. G. Moharam and T. K. Gaylord, "Diffraction analysis of dielectric surface-relief gratings: erratum," J. Opt. Soc. Am. 73, 411-411 (1983)
https://opg.optica.org/josa/abstract.cfm?uri=josa-73-3-411

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