A. V. Tikhonravov, M. K. Trubetskov, S. Sharapova, and Z. Wang, "Design of Aperiodic Multilayers for EUV Applications,"
in Optical Interference Coatings, M. Tilsch and D. Ristau, eds.,
OSA Technical Digest (online)
(Optical Society of America, 2013), paper TB.8.
We show that design techniques elaborated for conventional optical coating allow one to design EUV coatings with superior properties. High potential of designs composed of more than two materials is demonstrated.