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Conferences > OIC > 2010 > TuD > TuD5

Application of Indirect Broadband Optical Monitoring for the Production of Three-Line Minus Filters

Valery G. Zhupanov, Evgeny V. Klyuev, Pavel A. Konotopov, Alexander V. Tikhonravov, Michael K. Trubetskov, Ivan V. Kozlov, and Michael A. Kokarev

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Abstract

Indirect broadband optical monitoring can be successfully applied for the production of three-line minus filters. Pre-coating of witness substrates used to monitor low index layers raises an accuracy of depositions of these layers.

© 2010 Optical Society of America

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