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Evaluation of Optically Finished CaF2 Windows from Far-Infrared to Vacuum-Ultraviolet

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Abstract

CaF2 windows were evaluated by variable angle spectroscopic ellipsometry and spectrophotometer from far-infrared to vacuum-ultraviolet spectral regions. Effect of surface polishing and cleaning was investigated. Optical constant of CaF2 was presented from FIR to VUV.

© 2010 Optical Society of America

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