Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OIC > 2004 > WE > WE4

Accurate formulas for estimating the effect of surface micro-roughness on ellipsometric angles of dielectric thin films

A. A. Tikhonravov, A. V. Tikhonravov, and M. K. Trubetskov

Not Accessible

Your library or personal account may give you access

Abstract

Accurate formulas for the variations of ellipsometric angles caused by the surface micro-roughness are derived. These formulas are used for estimating sensitivities of the ellipso-metric angles to the thickness of surface overlayer presenting surface micro-roughness.

© 2004 Optical Society of America

PDF Article
More Like This
Spectroscopic ellipsometry of slightly inhomogeneous thin films: application of the new approximation for the ellipsometric angles Ψ and Δ

Alexander V. Tikhonravov, Michael K. Trubetskov, Anna V. Krasilnikova, and Enrico Masetti
TuB.5 Optical Interference Coatings (OIC) 1998

Ellipsometric Data Selection for More Accurate Optical Characterization of Thin Film Material

Suyong Wu, Yun Huang, Kaiyong Yang, Zhongqi Tan, Tianliang Qu, and Xingwu Long
ThC.4 Optical Interference Coatings (OIC) 2013

Effect of Surface Roughness on SHG Efficiency in Optical Thin Film Waveguides

Florence Armani-Leplingard, David K. Fork, and John J. Kingston
SD1 Advanced Solid State Lasers (ASSL) 1995

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use