Structure and Density Related Properties of Metal Oxide Films

H.K Pulker; S. Schlichtherle

doi:10.1364/OIC.2004.ThA1

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2004),
paper ThA1
•https://doi.org/10.1364/OIC.2004.ThA1

Structure and Density Related Properties of Metal Oxide Films

H.K Pulker and S. Schlichtherle

Optical Interference Coatings 2004

Tucson, Arizona United States
27 June–2 July 2004
ISBN: 3-5400-0364-9

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Structure and Fast Coatings (ThA)

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H. K. Pulker and S. Schlichtherle, "Structure and Density Related Properties of Metal Oxide Films," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2004), paper ThA1.

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Abstract

Structure and density of the material in a deposited film determine many important film characteristics. Energetic coating conditions, strongly influence both and the resulting environmental stable, constrained amorphous films offer interesting optical and mechanical properties.

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