Review of fundamentals of thin film growth

Norbert Kaiser

doi:10.1364/OIC.2001.MA1

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2001),
paper MA1
•https://doi.org/10.1364/OIC.2001.MA1

Review of fundamentals of thin film growth

Norbert Kaiser

Optical Interference Coatings 2001

Banff Canada
ISBN: 1-55752-682-6

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Deposition of Optical Coatings I (MA)

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N. Kaiser, "Review of fundamentals of thin film growth," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2001), paper MA1.

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Abstract

With the aim to engineer optical properties, thin film formation is reviewed as a process starting with nucleation followed by coalescence and subsequent thickness growth, all stages of which can be influenced by deposition parameters.

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