Abstract

This paper analyzes the impact of tool mass acceleration (TMA) values onto footprint shape stability in computer controlled polishing, presenting the second derivative footprint recording (SECondo) method. First experimental evidence is presented, demonstrating that for bonnet polishing, acceleration of tool mass significantly alters the pressure distribution within the footprint and consequently affects its cross section. In addition, we present experimental data indicating that it is possible to compensate for TMA effects by adjusting the inclination angle of precession during CCP accordingly.

© 2017 Optical Society of America

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