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Parametrization of a Subaperture Polishing Tool -Analysis of the Path Tests

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Abstract

For a removal simulation of a subaperture polishing process, the error measurement, the processing path and the removal characteristics of the tool are used as input. To determine the removal characteristics of the tool, typical path tests will be done. The problems in analyzing the measurement results and a possible analysis software solution are presented in this paper.

© 2017 Optical Society of America

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