With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.

© 2019 The Author(s)

PDF Article
More Like This
Building Large-Scale Programmable Photonic Circuits Using Silicon Photonic MEMS

Wim Bogaerts, Pierre Edinger, Alain Yuji Takabayashi, Iman Zand, Xiangfeng Chen, Xiaojing Wang, Hamed Sattari, Peter Verheyen, Moises A. Jezzini, Giuseppe Talli, Saurav Kumar, Marco Garcia Porcel, Antonio Ribeiro, Gaehun Jo, Niels Quack, Kristinn B. Gylfason, Frank Niklaus, and Umar Khan
PsTh1F.1 Photonics in Switching and Computing (PSC) 2020

Programmable Photonic Circuits using Silicon Photonic MEMS

Wim Bogaerts, Alain Yuji Takabayashi, Pierre Edinger, Iman Zand, Gaehun Jo, Hamed Sattari, Peter Verheyen, Moises A. Jezzini, Cleitus Antony, Giuseppe Talli, Mehrdad Saei, Saurav Kumar, Cristina Lerma Arce, Marco Garcia Porcel, Niels Quack, Kristinn B. Gylfason, Frank Niklaus, and Umar Khan
IM2A.1 Integrated Photonics Research, Silicon and Nanophotonics (IPRSN) 2021

Reducing Actuation Nonlinearity of MEMS Phase Shifters for Reconfigurable Photonic Circuits

Pierre Edinger, Carlos Errando-Herranz, and Kristinn B. Gylfason
SF2H.3 CLEO: Science and Innovations (CLEO_SI) 2019


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription