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50×50 Digital Silicon Photonic Switches with MEMS-Actuated Adiabatic Couplers

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Abstract

We report on monolithically integrated 50×50 digital silicon photonic switches with MEMS actuation, sub-microsecond switching time, low optical insertion loss (<9.6dB), high extinction ratio (50dB), broadband operation (1400-1700nm), and compact footprint (7.6×7.6mm2).

© 2015 Optical Society of America

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