We demonstrate a simple technique to fabricate cantilevers from bulk CVD sinle crystal diamond as well as from single crystal diamond membrane windows fabricated in a novel technique. Mechanical quality factors of cantilevers were measured. A mechanical Q-factor of as high as 500 was achieved.

© 2015 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription