SOI-based Tunable Microring Resonator using Microelectromechanical Cantilevers

Hossam Shoman; Kenaish Al Qubaisi; Paulo Moreira; Clara Dimas; Anatol Khilo; Marcus Dahlem

doi:10.1364/IPRSN.2016.ITu1B.2

Integrated Photonics Research, Silicon and Nanophotonics 2016

Vancouver Canada
18–20 July 2016
ISBN: 978-1-943580-14-9

From the session
Silicon Photonics I (ITu1B)

SOI-based Tunable Microring Resonator using Microelectromechanical Cantilevers

Hossam Shoman, Kenaish Al Qubaisi, Paulo Moreira, Clara Dimas, Anatol Khilo, and Marcus Dahlem

Advanced Photonics 2016 (IPR, NOMA, Sensors, Networks, SPPCom, SOF)
OSA technical Digest (online) (Optical Society of America, 2016),
paper ITu1B.2
•https://doi.org/10.1364/IPRSN.2016.ITu1B.2

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H. Shoman, K. Al Qubaisi, P. Moreira, C. Dimas, A. Khilo, and M. Dahlem, "SOI-based Tunable Microring Resonator using Microelectromechanical Cantilevers," in Advanced Photonics 2016 (IPR, NOMA, Sensors, Networks, SPPCom, SOF), OSA technical Digest (online) (Optical Society of America, 2016), paper ITu1B.2.

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Related Topics
Optics & Photonics Topics
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The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
- Microelectromechanical systems
- Silicon
Previously assigned OCIS codes
- Integrated optics devices (130.3120)
- Wavelength filtering devices (130.7408)
- Optical microelectromechanical devices (230.4685)

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Abstract

A new configuration of a tunable microring resonator using microelectromechanical silicon cantilevers for evanescent field perturbation, with electrostatic actuation, is demonstrated. A resonant wavelength shift of 0.4 nm is measured around 1558 nm.

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Abstract

Supplementary Material (1)

Integrated Photonics Research, Silicon and Nanophotonics 2016

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