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Low loss mid-infrared silicon waveguides by using pedestal geometry

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Abstract

Low loss mid-infrared silicon waveguides are demonstrated by using pedestal geometry. Using under-cutting technique the optical loss at wavelength λ=5µm is reduced from 9.5 to 2.9 dB/cm which enables the use of SOI waveguides for longer infrared applications.

© 2012 Optical Society of America

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