We demonstrate self-sustained mechanical oscillations at room temperature and ambient pressure in a silicon photonic crystal slot-cavity fabricated by a CMOS-Foundry. Optical quality factor as high as Qopt = 4 × 105 and an optomechanical coupling rate of g0/2π = 76 kHz are observed.

© 2016 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription

Supplementary Material (1)

» Media 1: PDF (2790 KB)