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Impact of Tapered Nano-Slits Grating on The Optical Enhancement of Photo-Sensing Devices

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Abstract

A nano-grating structure with a 5nm slit and 15 nm thickness was simulated. Optical enhancement, which can be harnessed to improve photo-sensing devices such as photodetectors and biosensors, was calculated for various tapered nanoslits.

© 2018 The Author(s)

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