Abstract

The recent advancements in on-chip silicon photonics has lead to the demonstration of a number of compact optoelectronic devices owing to the unique material properties of the semiconductor. Although to date most of the major advancements have been based on single-crystal silicon waveguides, lately there has been an increased interest in polycrystalline structures for integrated devices as the deposition process is easier, allowing for more design flexibility. As a photonics material, polysilicon offers good optical and electronic properties but it is typically associated with large losses due to scattering off grain boundaries and surface imperfections at the core-cladding interface.

© 2009 IEEE

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