Nano particle production by laser ablation and metal sputtering on Si-Wafer substrate

Mohammad Hossein Azhdast; Ghassem Azdasht; Heinrich Lüdeke; Klaus-Dieter Lang; Veronika Glaw

doi:10.1364/ASSL.2015.AM5A.3

Advanced Solid State Lasers 2015

Berlin Germany
4–9 October 2015
ISBN: 978-1-943580-02-6

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Student Poster Session (AM5A)

Nano particle production by laser ablation and metal sputtering on Si-Wafer substrate

Mohammad Hossein Azhdast, Ghassem Azdasht, Heinrich Lüdeke, Klaus-Dieter Lang, and Veronika Glaw

Advanced Solid State Lasers
OSA Technical Digest (online) (Optical Society of America, 2015),
paper AM5A.3
•https://doi.org/10.1364/ASSL.2015.AM5A.3

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M. H. Azhdast, G. Azdasht, H. Lüdeke, K. Lang, and V. Glaw, "Nano particle production by laser ablation and metal sputtering on Si-Wafer substrate," in Advanced Solid State Lasers, OSA Technical Digest (online) (Optical Society of America, 2015), paper AM5A.3.

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Abstract

This research relates to methods of deposition and patterning a surface with nano sputtered particles by Laser. The method is mask-less and without vacuum requirement which can be used in wire bonding and microelectronics devices.

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Advanced Solid State Lasers 2015

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