This presentation gives an overview of recent advances in the 1st- and 2nd generation MEMS FPI processes for near- and mid- infrared (NIR-MIR) wavelength sensing applications for automotive- and process industry. The measured values for the 1st generation NIR MEMS FPI devices for λ = 1.5 – 2.0 µm show FWHM = 15 nm at the optimization wavelength of 1750 nm. The 2nd generation MEMS process for produced devices for NIR λ = 1.9 – 2.5 µm (FWHM = 17nm) and MIR λ = 2.9 – 3.6 µm (FWHM = 22nm). A novel NIR sensor based on the 2nd generation MEMS FPI chips has been realized. The developed sensors are being validated for application in process control. Preliminary results show good signal levels, which allow following the status of esterification process.

© 2017 Optical Society of America

PDF Article
More Like This
MEMS Tunable Fabry-Pérot Filters for Infrared Microspectrometer Applications

Norbert Neumann, Martin Ebermann, Karla Hiller, Mario Seifert, Marco Meinig, and Steffen Kurth
AIT4B.2 Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) 2016

Fabry-Perot Interferometer Spectral Engines for Imaging Applications

Jarkko Antila, Jussi Mäkynen, Anna Rissanen, Antti Näsilä, Marko Kaarre, and Heikki Saari
AM1B.5 Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) 2013

High sensitivity refractive index sensor based on optical fiber ultra-weak Fabry-Perot interferometer

Pengcheng Chen, Xuewen Shu, and Haoran Cao
s2571 Conference on Lasers and Electro-Optics/Pacific Rim (CLEOPR) 2017


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription