The combination of an external cavity quantum cascade laser with a MOEMS based scanning diffraction grating of 1 kHz resonance frequency and its electrostatic drive is described. The characteristics of the MOEMS scan module as well as of the entire μECQCL like spectral line width and wavelength eproducibility are shown. Finally the μEC-QCL is used as light source for real time spectroscopic sensing of polystyrene and carbon monoxide.

© 2016 Optical Society of America

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