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Yellow and green luminescence in single-crystal Ge-catalyzed GaN nanowires grown by low pressure chemical vapor deposition

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Abstract

The low pressure chemical vapor deposition (LPCVD) method is used to synthesize GaN nanowires. It is an alternative technique to the more conventional molecular beam epitaxy (MBE) or metal-organic vapor phase epitaxy (MOVPE). Nanowires grown by LPCVD are shown to have a single-crystal Wurtzite structure and present a strong luminescence at a near-band-gap energy. A sub-band-gap defect-related luminescence is also observed in the visible range. Identified as yellow (YL) and green (GL) luminescences, these emissions are very similar to the one reported from bulk and thin 2D GaN film samples and may be attributed to comparable defects. In this work, using photoluminescence (PL) spectroscopy with an above-band-gap excitation and a time-resolved PL with a below-band-gap excitation, we investigate whether these luminescences originate from bulk and/or surface defects. We demonstrate that the YL defect-related band can be significantly suppressed by 88% after passivating the surface of nanowires with aluminum oxide. This suppression is in favor of the localized surface defects responsible for the yellow luminescence, while the green luminescence band originates from deeper bulk defects.

© 2017 Optical Society of America

Corrections

23 May 2017: Typographical corrections were made to the author affiliations.

1. Introduction

GaN and related materials are today widely used in opto-electronic devices, such as light emitting diodes (LEDs), laser diodes and photo-detectors with operation wavelengths going from visible to a deep UV spectral range [1, 2]. However, the material quality is still a major issue for thin film devices, which suffer from threading dislocations mainly induced by a lattice mismatch with the growth substrate, especially for nitride layer on Si [3]. Defects are inherent to any growth process, especially to III-Nitride materials which are mainly synthesized by heteroepitaxy due to the extremely high cost of native GaN substrates with low defect density and high structural and optical quality. Many physical mechanisms triggered by different defects are still not perfectly understood [4–6]. Knowing that the GaN crystal quality directly affects its light emitting properties, the suppression of below-gap states, that act as radiative or non-radiative recombination centers, is of crucial importance.

The defect-related yellow (YL) and green (GL) luminescence are often observed in GaN, the formation and transition energy of these defects in GaN is a topic of intense research [7–11]. Yet, the origin of these defect-induced luminescences, remain under debate. In 2-dimensional layers, etching experiments demonstrated a near independence of the visible intensity with the etch depth supporting the bulk nature of the defects [12], whereas other experiments using photo-voltage spectroscopy argued in favor of surface defects as being responsible for the visible band [13,14]. From literature, the main candidates for YL band are defects, either isolated carbon in a nitrogen site (CN) [8], a carbon-oxygen complex (CNON) [9], or other complexes such as VGa-3H or VGaON -2H [15]. The GL band, observed in high-purity GaN, is most recently [16] associated with transitions from different charge levels of the same CN defect responsible for YL band.

Changing from the 2D film to the nanowire morphology provides an elegant solution to the dislocation problem. Indeed, thanks to the efficient strain relaxation by the free lateral surface, dislocation-free nanowires (NWs) can be grown on highly mismatched substrates [17]. GaN NWs open a new window of applications presenting a number of potential advantages for nanophotonics and nanoelectronics. In particular, nitride NWs have been proposed as an active medium for high-efficiency 3D LEDs [18–20] and high sensitivity photodetectors [21].

The most widespread way to fabricate GaN NWs relies on epitaxial techniques such as Molecular Beam Epitaxy (MBE) or Metalorganic Vapor Phase Epitaxy (MOVPE) using catalytic, self-catalyzed or selective area growth modes [22,23]. Although these techniques provide the best control over the wire morphology and composition, they are expensive and present difficulties for up-scaling the sample size. For a large number of applications (e.g. light sensors for UV exposure monitoring) the development of a low cost synthesis technique is desirable. The Low Pressure Chemical Vapor Deposition (LPCVD) method, which allows a significant cost reduction due to a lower vacuum and a lower thermal budget, can also be used for GaN NW growth [24].

In this letter, we report on the synthesis and characterization of GaN NWs grown by catalyst-assisted LPCVD. We demonstrate that the NWs are single crystal with Wurtzite structure and present an intense near-band-edge (NBE) luminescence. YL and GL bands are also observed and are similar to the ones reported from bulk and thin film GaN samples. Thanks to their large surface to volume ratio, LPCVD-grown GaN NWs appear as excellent candidates to investigate the origin of YL and GL bands. The presence of high density of surface states tends to pin the Fermi level near the surface and bends the electronic bands that affects the recombination process [25]. Structural defects, such as dangling bonds or point defects, charge the surface states and are reported to influence the optical and transport properties of nanowires [26,27]. By passivating the surface of LPCVD-grown GaN NWs with a thin layer of Al2O3, we demonstrate a drastic reduction of the defect-related YL band while maintaining the GL band and the NBE emission unchanged. The defect responsible for the YL band is believed to be localized near the surface of GaN nanowires. The GL not being affected by NW passivation, it could be attributed to defects with bulk nature.

2. Methodology

The GaN nanowires are grown by LPCVD on (100) Si substrate using Germanium (Ge) as catalyst. Previously to the growth, Si substrate is coated with a 3 nm thick layer of Ge by electron-beam evaporation system (Edwards). The sample is heated at 750 °C in the LPCVD reactor to dewet the Ge coating and form nanoparticles that act as seeds for the GaN NWs. Growth happens at 750 °C for 30 min under a continuous flow of 100 sccm of NH3, diluted in 150 sccm of H2. A solid form of Gallium (Ga) (99.99% purity) was placed next to Si samples. The vapor pressure of Gallium (melting point at 29.76 °C), amount of Gallium vapor that exists in gaseous form around the Ga liquid source, increases with temperature and provides the Ga source for nanowire growth. Before the passivation process, the sample was cleaned using classical organic (Isopropanol Alcohol (IPA) and Acetone) and inorganic (Buffer Oxide Etchant (BOE)) solutions. GaN NWs have been passivated with a 5 nm thin shell of Al2O3 deposited by Atomic Layer Deposition (ALD) at 250 °C using a Cambridge Nanotech Savannah 100/200 system.

As-grown and passivated nanowire (NW) ensembles were characterized and analyzed by scanning electron microscopy (SEM; LEO 1550 Gemini, electron gun at 5 kV), transmission electron microscopy (TEM; Tecnai X-TWIN, electron gun at 200 keV FEG and probe current of 0.5 nA at 1 nm) and photoluminescence (PL) spectroscopy. The PL set-up consisted of a T64000 Horiba Jobin-Yvon high resolution spectrometer with a continuous Helium-Cadmium laser emitting at 325 nm with laser power of 1.76 mW. The PL mapping consists in a 532 nm 37 μW continuous wave laser (WITec focus innovations) with x100 microscope objective of numerical aperture NA=0.8 (OLYMPUS). The emission is filtered at 570 nm with a longpass filter. For PL mapping, the luminescent intensity integrated over the 580–630 nm range is taken for each point. The scanning is done with a resolution of 0.5 μm/step. The time-resolved set-up consisted on a Picosecond Pulsed Diode Laser EPL-375 from Edinburgh Instruments. This excitation source emits at 371 nm ± 5 nm, with pulse period of 50 ns, 70 ps wide and an average power of 0.15 mW. The decay was measured using a Hamamatsu H7422-40 photo-sensor associated with a single-grating emission monochromator of 1200 grooves/mm density.

3. Results and discussion

Fig. 1.a shows scanning electron microscope (SEM) images of GaN NWs grown by LPCVD. Nanowires grow in random directions following a Vapor-Liquid-Solid (VLS) mechanism catalyzed with Ge. It is worth noticing that the background is composed of Germanium seeds that have not resulted in NW growth. Most likely, the supersaturation was not reached for these droplets explaining the absence of the VLS growth. GaN NWs present a straight shape and show a single-crystal Wurtzite structure growing along the c-axis, as previously reported [24], see also the transmission electron microscope images in appendix (Fig. 4). As-grown nanowires are characterized by a spatial distribution of ∼108 NWs/cm2, an average length of 3.4 ± 0.9 μm and a diameter of 34 ± 7 nm, determined from SEM images. Fig. 1(b) shows the GaN NWs after passivation with Alumina Oxide deposition. The NWs remain straight. The SEM charging effects confirm the successful deposition of alumina oxide around the GaN nanowires. Moreover, the average diameter after passivation is 41 ± 6 nm. This thickening indicates that the GaN core as embedded into a ∼3.5 nm thick Al2O3 shell.

 figure: Fig. 1

Fig. 1 (a) SEM image of Ge-catalyzed GaN nanowires. (b) Same NWs after coating with 5 nm Al2O3. (Inset) higher magnification images of individual nanowires showing the Ge rich tip. Scale bars in (a, b) and insets indicate 500 nm and 100 nm, respectively

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Figure 2 presents the PL characterization, at room temperature, of a ensemble of single-crystal GaN nanowires before (Fig. 2(a)) and after (Fig. 2(b)) passivation. Both nanowire ensembles were analyzed under the same excitation and detection conditions so that the emission intensities can be compared. PL emission of Ge (contained inside the droplet on top of nanowires) is localized from 0.6 to 0.9 eV and the Al2O3 shell (a wide band gap material with Eg = 6.6 eV) surrounding the core-GaN NWs, is transparent. The PL spectra of non-passivated GaN nanowires shows a NBE emission at 3.58 eV, characterized by a full width at half maximum (fwhm) of 450 meV. The spectrum is slightly asymmetric with a higher broadening at lower energies. A wide emission in the visible range, centered around 2.09 eV with a fwhm equal to 588 meV, is also observed. The BOE cleaning before passivation had no effect on the PL. And similar peaks are present in passivated GaN NWs. The NBE peak of GaN is observed at 3.58 eV with a sharper fwhm of 305 meV and a decrease by 3 % in intensity compared to non-passivated nanowires. We associate this slight decrease to a spatial variability of the nanowire ensemble since different areas were probed before and after passivation. The cleaning with BOE, before Al2O3 deposition, had no effect on the PL emission.

 figure: Fig. 2

Fig. 2 Photoluminescence spectra of a forest of GaN nanowires before (left) and after (right) passivation excited with HeCd laser at 325 nm. The discontinued lines are Gaussian fits showing YL and GL band. (insets) Mapping of YL band emission from single nanowire excited with a continuous diode laser at 532 nm.

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The NBE peak is quite broad and strongly blue-shifted (for both as-grown and passivated NWs) compared to bulk undoped GaN. This shift is associated to the heavy n-doping of these nanowires (above 1019 cm−3). This high level doping most probably originates from the incorporation of Ge from the catalyst as Ge appears to be an efficient donor for GaN [28] (see Appendix A2 about GaN near-band-edge shift). The second peak in the visible range, is slightly shifted to higher energies (centered around 2.15 eV). We remark that its intensity decreases by 88 %, after passivation. The visible luminescence of these LPCVD-grown GaN nanowires is wide and higher in intensity than the NBE emission. Few reports show this PL signature in GaN NWs grown by the classical techniques, such as MOCVD [29] or Plasma Assited MBE. By contrast it is more commonly observed in thin film GaN [4].

Gaussian fitting of the asymmetric visible PL peak of passivated GaN NWs resulted in two distinct contributions: one centered at 2.09 eV and another at 2.40 eV (Fig. 2.b). The peak at 2.09 eV is commonly identified as a Yellow Luminescence, the one at 2.40 eV is associated to Green Luminescence. By considering the combination of these two peaks, the visible luminescence of as-grown nanowires can be attributed to a strong YL band emission (IYL/INBE = 4.63), dominating a weak contribution of GL emission. By contrast, the visible luminescence of passivated NWs can be described as a combination of YL band (with a drastic decrease in its intensity IYL/INBE = 0.60) and a GL band. The insets in Fig. 2 show the mapping of PL emission from single nanowire while excited with a laser diode at 532 nm (see Appendix A3 for more data). Thus, only the YL defect state is excited showing a strong and uniform distribution along the as-grown nanowire (Fig. 2(a)) while there is almost no YL emission from Al2O3 coated nanowire (Fig. 2(b)).

Time-resolved emission measurements show that after passivating the surface of the GaN NWs, the lifetime decay varies significantly for the YL-band (Fig. 3(a)). A 371 ± 5 nm pulsed laser was used to excite the defect-related states only. YL lifetime decay is observed as a single exponential decay before Al2O3 deposition (τ1 = 0.23 ± 0.01 ns) while a slower component appears after passivation (τ1 = 0.18 ± 0.01 ns and τ2 = 5.90 ± 0.17 ns). τ1 and τ2 are the characteristic times of the bi-exponential decay (as defined in Eq. 1 of Appendix A4). The fast component in YL remains almost constant after passivating the surface, suggesting an emission from similar recombination state, but its contribution decreases, which concurs with the weakened YL emission observed earlier (Fig. 2), with Al2O3 layer most surface states may have been suppressed. However, after passivation the YL emission includes an additional slower component that may originate either from a volume recombination or a new defect could have been created by the Al2O3 deposition (interfacial defect states). From PL observations, this overall defect emission is still much weaker than before passivation.

 figure: Fig. 3

Fig. 3 Lifetime decay curves of YL (564 nm) and GL (489 nm) emission from quasi-resonant excited with a pulsed laser at 371 nm ± 5 nm. The instrument response function is 0.35 ns. The time constants are obtained after deconvolution with the instrument response. The exponential decay fitting is shown with full lines.

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By comparison with the YL band, where the intensity of PL and decay curves are strongly affected by the passivation of NWs, the GL band is almost unchanged (see Appendix A4 for more data). The presence of high density of surface states tends to pin the Fermi level near the surface and bends the electronic bands which affects the recombination process. Growth of alumina oxide layer on the surface of core-GaN NWs induces a modification of the nature of surface charges, such as active defects. The poor effect of this passivation on GL decay curves is in favor of the selectivity of the process to YL related-defects. Thus, the selective suppression of the YL emission suggests YL peak is mostly related to structural defects located at or near the surface while GL-related defects are more uniformly distributed in the NW volume. This observation is consistent to the earlier photo-voltage spectroscopy [13] and temperature and excitation dependence experiments [14] on GaN layers.

 figure: Fig. 4

Fig. 4 a) High resolution TEM image taken at the bottom of a non-passivated single-crystal GaN nanowire. Inset: The corresponding electron diffraction pattern (ED) b), c) and d) High Resolution TEM images of non-passivated single-crystal GaN nanowires.

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4. Conclusion

The optical properties of as-grown and aluminum-oxide passivated GaN nanowires synthesized by LPCVD have been analyzed. As-grown nanowires exhibit a strong visible luminescence. By analyzing the optical properties of the as-grown NWs and passivated with a thin Al2O3 shell, we observed that the visible luminescence results from two contributions: a yellow (2.09 eV) and green (2.40 eV) band. The passivation of NWs drastically reduces the yellow band while maintaining the green band and NBE emission. The results suggest the defects responsible for the YL band could be localized near the surface of the GaN nanowires and can be easily passivated by Al2O3 ALD while the defects causing GL are of bulk nature. LPCVD-grown GaN nanowires are cost-effective and their quality can be improved using a thin layer Al2O3 passivation of the surface.

Appendix

A1. Structural characterization

Ge-assisted catalytic growth by LPCVD method leads to the synthesis of GaN NWs with high crystalline structure as demonstrated by High Resolution Transmission Electron Microscopy (HRTEM) and Electron Diffraction (ED) characterization (Figure 4). The as-grown GaN NWs exhibit a single crystal structure growing along the c-axis, atomic planes are separated by 2.52 Å. The single-crystal structure and the [0001] growth direction are confirmed by the ED image in the inset of Fig. 4. TEM images of single nanowires in Fig. 4(b), 4(c) and 4(d) give insights on the morphology of Ge-catalyzed GaN nanowires. The surface of as-grown GaN NWs is atomically sharp with uniform lattice and no amorphous phase is observed.

A2. GaN near-band-edge shift

In both as-grown and passivated NWs, we observe that the band-edge peak is quite broad and largely shifted compared to bulk undoped GaN. Indeed, the photoluminescence (3.58 eV) is shifted by 140 meV compared to the bulk GaN at 300K (3.44 eV [30]). This shift could have been be attributed to the quantum confinement effects. However, both SEM and TEM characterizations confirmed the diameter of core-GaN nanowires (around 34 nm) to be much larger than the Bohr radius of GaN bulk exciton which has been reported to be 2.8 nm [31]. This Bohr radius value thus excludes the hypothesis that the shift may originate is originated from quantum confinement effects.

By contrast, the shift could be attributed to the high level of doping of our GaN NWs. Significant band-edge peak blue shift for heavily Si-doped Gallium Nitride layers [32], and nanowires [33,34] has been reported. In our case, GaN NWs were grown on Silicon substrate using Germanium as a catalyst. Since both Germanium and Silicon appear to be electron donors for GaN, the blue shift observed in our GaN NWs can be explained by the band filling effect. In fact, due to the high doping element concentration, electrons populate states inside the conduction band, pushing the Fermi level higher in energy and giving rise to indirect optical transitions (with non-conservation of k-vector allowed by many-body interactions). This band-filling hypothesis is supported by the observed high broadening and asymmetry of the PL peak, with a higher broadening on the low energy side, which is typical for momentum non-conserving transitions [35]. For bulk n-doped GaN, the emission first shifts to longer wavelengths, which is attributed to band gap renormalization due to Coulomb effects (up to approx. 1019 cm−3), and then blue-shifts due to band filling [32,36]. Therefore, the strong blue-shift of the NBE emission suggests that the nanowires are heavily n-doped. This high level doping most probably originates from the incorporation of Ge from the catalyst, Ge appearing as more efficient donors for GaN than Si [28].

A3. Mapping of YL band emission from single nanowire

For the mapping, GaN NWs samples were sonicated in a pure Isopropanol Alcohol (IPA) then dispersed on Si substrate. Figure 5(a) shows one single as-grown GaN nanowire with another smaller one, probably broken during sonication. The associated PL mapping (Fig. 5(b)) matches exactly with the GaN nanowire position, the emission seems uniformly distributed along the wire showing a similar distribution for the related defect. The comparison with Al2O3 coated NWs (Fig. 5(e)) shows the effect of passivation on YL band, the emission is drastically suppressed. We see an emission only at the bottom of two bonded wires (Fig. 5(e), marker ‘2’) while the nanowire near the marker ‘3’ doesn’t show any emission.

 figure: Fig. 5

Fig. 5 Optical microscope image of dispersed nanowires on Si substrate of as-grown (a) and Al2O3 coated (d) NWs. Associated mapping of YL band emission from as-grown (b) and Al2O3 coated (e) NWs. Brightest emission from points 1 and 2 for single as-grown (c) and Al2O3 coated (f) nanowire, respectively. Excitated with a continuous diode laser at 532 nm

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A4. Lifetime decay

Figure 6 show the lifetime decay curves for several wavelengths from as-grown (Fig. 6(b)) and Al2O3 coated GaN nanowires (Fig. 6(b)). The qualitative observation when comparing these decays confirms the initial conclusion on the selectivity of passivation on the YL band. Indeed, for lifetime decay curves at 620, 564 and 557 nm (close to YL band) we see a strong effect of passivation on the nature of surface charges. The higher the detection energy we observe at (toward GL), the lesser is the effect of the passivation.

 figure: Fig. 6

Fig. 6 Lifetime decay curves from quasi-resonant excitation of a forest of as-grown (a) and Al2O3 coated (b) GaN NWs. Excitated with a pulsed laser at 371 nm ± 5 nm.

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Exponential fit

For analysis, we fit the decay curves in Fig. 3 with a single or double exponential using the following equation:

N(t)=N1(0)exp(tτ1)+N2(0)exp(tτ2)
where N(t) is the total number of population from all emission channels after t time. N1(0) and N2(0) are the initial population at t = 0, which have emission lifetimes for fast and slow emission channels of τ1 and τ2, respectively.

Funding

National Research Foundation (NRF) of Singapore (NRF-CRP12-2013-04); French “Agence Nationale de la Recherche” (ANR) through “GaNeX” (ANR-11-LABX-2014).

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Figures (6)

Fig. 1
Fig. 1 (a) SEM image of Ge-catalyzed GaN nanowires. (b) Same NWs after coating with 5 nm Al2O3. (Inset) higher magnification images of individual nanowires showing the Ge rich tip. Scale bars in (a, b) and insets indicate 500 nm and 100 nm, respectively
Fig. 2
Fig. 2 Photoluminescence spectra of a forest of GaN nanowires before (left) and after (right) passivation excited with HeCd laser at 325 nm. The discontinued lines are Gaussian fits showing YL and GL band. (insets) Mapping of YL band emission from single nanowire excited with a continuous diode laser at 532 nm.
Fig. 3
Fig. 3 Lifetime decay curves of YL (564 nm) and GL (489 nm) emission from quasi-resonant excited with a pulsed laser at 371 nm ± 5 nm. The instrument response function is 0.35 ns. The time constants are obtained after deconvolution with the instrument response. The exponential decay fitting is shown with full lines.
Fig. 4
Fig. 4 a) High resolution TEM image taken at the bottom of a non-passivated single-crystal GaN nanowire. Inset: The corresponding electron diffraction pattern (ED) b), c) and d) High Resolution TEM images of non-passivated single-crystal GaN nanowires.
Fig. 5
Fig. 5 Optical microscope image of dispersed nanowires on Si substrate of as-grown (a) and Al2O3 coated (d) NWs. Associated mapping of YL band emission from as-grown (b) and Al2O3 coated (e) NWs. Brightest emission from points 1 and 2 for single as-grown (c) and Al2O3 coated (f) nanowire, respectively. Excitated with a continuous diode laser at 532 nm
Fig. 6
Fig. 6 Lifetime decay curves from quasi-resonant excitation of a forest of as-grown (a) and Al2O3 coated (b) GaN NWs. Excitated with a pulsed laser at 371 nm ± 5 nm.

Equations (1)

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N ( t ) = N 1 ( 0 ) exp ( t τ 1 ) + N 2 ( 0 ) exp ( t τ 2 )
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