Abstract
Heterodyne interferometry is a powerful tool for achieving high precision and fast measurement. We developed an angle measurement system based on heterodyne interferometry by combining discrete equal-spacing longitudinal modes of optical frequency comb with an acousto-optic modulator. Using a self-designed grating-corner-cube sensor, this method can achieve a two-dimensional angle measurement with sub-arcsecond accuracy and megahertz (MHz) update rate. We experimentally demonstrate a precision of 0.073 arcsec under a 3 MHz update rate, and comparison residuals are kept within 0.063 arcsec over 300 arcsec when compared to a piezo stage. In the dynamic measurement of a 40 Hz frequency, the continuous sinusoidal motion of 0.05 arcsec can be clearly distinguished and reconstructed.
© 2024 Optica Publishing Group
Full Article | PDF ArticleMore Like This
Siyu Zhou, Vunam Le, Shilin Xiong, Yuetang Yang, Kai Ni, Qian Zhou, and Guanhao Wu
Photon. Res. 9(2) 243-251 (2021)
Afsaneh Shoeib, Manuel P. Fernández, Connor Rowe, Reza Maram, Pasquale Ricciardi, and José Azaña
Opt. Lett. 49(5) 1245-1248 (2024)
Siyu Zhou, Ruilin Jiang, Ruixue Zhang, Liheng Shi, Di Zhang, and Guanhao Wu
Opt. Lett. 48(5) 1104-1107 (2023)