Abstract
We propose and experimentally demonstrate a high-order coupled-resonator optical waveguide (CROW) nanobeam filter with semi-symmetrical Fano resonance enhancement. Thanks to the tight arrangement of multiple nanobeams and assistance of the partial transmission element, the designed filter has a high-contrast transmission and low insertion loss. Finally, the fabricated filter has a compact size of ${20}\;\unicode{x00B5}{\rm m} \times {10}\;\unicode{x00B5}{\rm m}$, a high extinction ratio as much as 70 dB, and an insertion loss as low as 1 dB. This filter shows a passive structure without thermal control configuration for calibration on each resonator. This compact filter can be a basic building block for various applications requiring high extinction ratio filtering, such as single-photon source filtering of integrated photon chips.
© 2021 Optical Society of America
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