Abstract
We demonstrate, to the best of our knowledge, the first thermally reconfigurable high- silicon carbide (SiC) microring resonators with integrated microheaters on a 3C-SiC-on-insulator platform. We extract a thermo-optic coefficient of around for 3C-SiC from wavelength shift of a resonator heated by a hot plate. Finally, we fabricate a 40-μm-radius microring resonator with intrinsic of 139,000 at infrared wavelengths () after integration with a NiCr microheater. By applying current through the microheater, a resonance shift of 30 pm/mW is achieved in the microring, corresponding to per phase shift. This platform offers an easy and reliable way for integration with electronic devices as well as great potential for diverse integrated optics applications.
© 2019 Optical Society of America
Full Article | PDF ArticleMore Like This
Xi Wu, Tianren Fan, Ali A. Eftekhar, Amir H. Hosseinnia, and Ali Adibi
Opt. Lett. 46(17) 4316-4319 (2021)
Tianren Fan, Hesam Moradinejad, Xi Wu, Ali A. Eftekhar, and Ali Adibi
Opt. Express 26(20) 25814-25826 (2018)
Tianren Fan, Xi Wu, Ali A. Eftekhar, Matteo Bosi, Hesam Moradinejad, Eric V. Woods, and Ali Adibi
Opt. Lett. 45(1) 153-156 (2020)