Abstract
Aiming to pursue a micromirror possessing many desired characteristics, such as linear control, low power consumption, fast response, and easy fabrication, a new piezoelectric actuation strategy is presented. Different from conventional piezoelectric actuation cases, we first propose using AlN film as the active layer for actuating the micromirror. Owing to its good CMOS compatible deposition and patterning techniques, the AlN based piezoelectric micromirror has been successfully fabricated with a modified silicon-on-insulator-based microelectromechanical system (MEMS) process. At the same time, various mirror movement modes operating at high frequencies and excellent linear relationship between the movement and the control signal both have been experimentally demonstrated.
© 2018 Optical Society of America
Full Article | PDF ArticleMore Like This
Junning Zhang, Xinyue Zhang, Yan Wang, Tunan Lv, and Hongbin Yu
Opt. Lett. 48(18) 4777-4780 (2023)
Kah How Koh, Takeshi Kobayashi, and Chengkuo Lee
Opt. Express 19(15) 13812-13824 (2011)
Carlos Errando-Herranz, Frank Niklaus, Göran Stemme, and Kristinn B. Gylfason
Opt. Lett. 40(15) 3556-3559 (2015)