Abstract
In this Letter, we report on recent experimental results of a short pulse amplification at 10.6 μm wavelength required to drive a tin laser-produced plasma (LPP) extreme ultraviolet (UV) source. We report for the first time, to our best knowledge, a highly efficient pulsed amplification in a multipass amplifier built on RF-discharge-excited, diffusion-cooled , planar waveguide industrial laser. About 2 kW of output average power was obtained from about 100 W input average power in pulses at 100 kHz pulse repetition frequency. As much as 60% relative extraction efficiency, as compared to continuous-wave amplification in similar conditions, and 5.8% wall-plug efficiency was recorded and believed to be the highest reported so far. An improvement of extraction efficiency by is reported when driving the amplifier with two lines of regular band in good agreement with expectations.
© 2014 Optical Society of America
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