Abstract
We demonstrate inversion of three-dimensional photonic crystal templates fabricated in a large area with diffractive-optics lithography. A custom-designed two-dimensional diffractive optical element was used to generate highly uniform, bicontinuous, three-dimensional photonic crystal templates in a single-laser exposure. Chemical vapor deposition successfully infiltrated the thick periodic polymer structure to deposit amorphous silica and thereby define an all-silica inverted photonic crystal after polymer removal, as confirmed by focused ion-beam milling and energy-dispersive x-ray spectroscopy. The diffractive-optics lithography permitted a large number of uniform layers to form that manifested in the recording of a strong stopband in the telecom band.
© 2009 Optical Society of America
Full Article | PDF ArticleMore Like This
Yuankun Lin, Ahmad Harb, Karen Lozano, Di Xu, and K. P. Chen
Opt. Express 17(19) 16625-16631 (2009)
Debashis Chanda, Ladan Abolghasemi, and Peter R. Herman
Opt. Express 14(19) 8568-8577 (2006)
Debashis Chanda, Ladan E. Abolghasemi, Moez Haque, Mi Li Ng, and Peter R. Herman
Opt. Express 16(20) 15402-15414 (2008)