Abstract
We describe the formation of ZrOxFy optical waveguides by oxygen ion-beam-assisted deposition of ZrF4 films. Waveguide losses less than 1 dB/cm for the TE0 mode at 514 nm resulted from bombardment with 600-eV ions, and the waveguide index was a function of bombarding current at this energy, with a maximum change of Δn = 0.28. Local bombardment of a waveguide resulted in generation of an integrated planar lens compatible with holographic fabrication. The process is also suitable for the formation of graded-index waveguides.
© 1995 Optical Society of America
Full Article | PDF ArticleMore Like This
P. J. Martin, H. A. Macleod, R. P. Netterfield, C. G. Pacey, and W. G. Sainty
Appl. Opt. 22(1) 178-184 (1983)
Roger P. Netterfield, W. G. Sainty, P. J. Martin, and S. H. Sie
Appl. Opt. 24(14) 2267-2272 (1985)
James D. Targove, John P. Lehan, Linda J. Lingg, H. Angus Macleod, J. A. Leavitt, and L. C. Mclntyre
Appl. Opt. 26(17) 3733-3737 (1987)