Abstract

We demonstrate, to the best of our knowledge, the first thermally reconfigurable high-$Q$ silicon carbide (SiC) microring resonators with integrated microheaters on a 3C-SiC-on-insulator platform. We extract a thermo-optic coefficient of around $2.67\times {10}^{-5}/\mathrm{K}$ for 3C-SiC from wavelength shift of a resonator heated by a hot plate. Finally, we fabricate a 40-μm-radius microring resonator with intrinsic $Q$ of 139,000 at infrared wavelengths ($\sim 1550\mathrm{nm}$) after integration with a NiCr microheater. By applying current through the microheater, a resonance shift of 30 pm/mW is achieved in the microring, corresponding to $\sim 50\mathrm{mW}$ per $\pi$ phase shift. This platform offers an easy and reliable way for integration with electronic devices as well as great potential for diverse integrated optics applications.

© 2019 Optical Society of America

High-Q ultrasensitive integrated photonic sensors based on slot-ring resonator on a 3C-SiC-on-insulator platform

Xi Wu, Tianren Fan, Ali A. Eftekhar, Amir H. Hosseinnia, and Ali Adibi
Opt. Lett. 46(17) 4316-4319 (2021)

High-Q integrated photonic microresonators on 3C-SiC-on-insulator (SiCOI) platform

Tianren Fan, Hesam Moradinejad, Xi Wu, Ali A. Eftekhar, and Ali Adibi
Opt. Express 26(20) 25814-25826 (2018)

High-quality integrated microdisk resonators in the visible-to-near-infrared wavelength range on a 3C-silicon carbide-on-insulator platform

Tianren Fan, Xi Wu, Ali A. Eftekhar, Matteo Bosi, Hesam Moradinejad, Eric V. Woods, and Ali Adibi
Opt. Lett. 45(1) 153-156 (2020)

Racetrack microresonator based electro-optic phase shifters on a 3C silicon-carbide-on-insulator platform

Tianren Fan, Xi Wu, Sai R. M. Vangapandu, Amir H. Hosseinnia, Ali A. Eftekhar, and Ali Adibi
Opt. Lett. 46(9) 2135-2138 (2021)

High thermo-optic tunability in PECVD silicon-rich amorphous silicon carbide

Li-Yang Sunny Chang, Steve Pappert, and Paul K. L. Yu
Opt. Lett. 48(5) 1188-1191 (2023)