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Abstract
It is challenging for the multi-spectral photodetector to have a compact structure, high spectral resolution, and high detection efficiency. This paper reports on a new approach for compact multi-spectral visible light detecting based on the hexagonal lattice silver nanodisk arrays atop optical cavity substrates. Through numerical calculations and optimizations of experiments, we verified that the narrow band responsivity of the photodetector was caused by coupling the surface plasmonic resonances and cavity mode. The multi-spectral photodetector exhibited that the minimum FWHM and the maximum responsivity of was achieved to be 80 nm and 91.5 mA·W-1, respectively. Besides, we also analyzed the influence of the proposed structure on the energy wastage by numerical comparison. The proposed way for multi-spectral photodetector is promising to be an excellent design for the narrow band spectral detection. The design can also be easily integrated with CMOS devices and applied to other spectral regimes for different applications.
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1. Introduction
Multi-spectral photodetectors (MSP) have been widely used in agriculture, biomedicine, and many other scientific and industrial fields [1,2]. Traditional multispectral detectors require different organic dyed optical filters to block the incident light with a wavelength outside the desired detection spectrum. However, the dye filters limit the integration and application of the multispectral detectors due to poor stability, low transmission efficiency, and huge size [3–5]. Therefore, the alternative method development for compact MSP is a substantial improvement over current technology.
The application of metasurface was proposed to achieve integrated and spectrally sensitive detectors due to its extraordinary ability to manipulate light beyond the optical diffraction limit [6–18]. The substrate of metasurface always chose the glass in the previous research [19–26], then the glass substrate was attached to the surface of detector for spectral detection. Unfortunately, the glass as a colour filter may change the optical properties of the original detector, such as reducing the transmission efficiency, affecting the colour spectra and other problems arising from diffraction [26–29]. Recently, there are several reports on the spectrally sensitive detector with a nanostructure direct contact with the semiconductor [28–34]. For example, the plasmonic gratings structure [32] utilising the charge accumulation mechanism based on the Al-Si Schottky-based structure was proposed as a compact colour detector. The device can separate and detect of colours with the measurement full width at half maximum (FWHM) of approximately 110 nm. Lin et al [34]. proposed a metallic hole array structure for colour selective photodetector, the device took advantage of the near-field surface plasmonic effect around the Al-Si junction to enhance the optical absorption of Si. In the detector. the minimum FWHM was 100 nm for the color detecting. Nevertheless, the filter-free devices [29–33] were initially only proposed for the primary RGB spectrum. The relatively broad FWHM and the low spectral resolution may impede the spectral detection of the device. Therefore, the increment of the number of detection channels and the decrement of the FWHM are of great significance for the developing of spectral resolution detectors. Besides, the contemporary studies [26–34] have only focused on the spectral resolution, and the energy wastage caused by the metasurface has seldom been considered.
Here, we proposed a new way for the MSP based on the hexagonal-lattice silver nanodisks arrays atop optical cavity substrate. Numerical calculation confirmed that the plasmonic based structure with different transmission spectra is caused by coupling between the surface plasmon resonances and cavity mode. Furthermore, we fabricated the MSP with eight channels for spectral detection with a narrowband responsivity. Our simulation and experimental results show that the performance of the MSP can be significantly improved by using the optical cavity substrate in comparison with metasurface/Si detector. For multi-spectral imaging applications, the hexagonal-lattice silver nanodisk arrays atop optical cavity substrate is a highly promising method for directly integrating with CMOS devices and increasing the number of pixels with different spectra.
2. Methods
2.1Simulations.
In the simulation, the source was set as transverse-electric (TE)- polarized plane waves from 1 um above the metasurfaces. The wavelength of the source in the manuscript was set from 400 nm to 1100 nm with a step of 1 nm. The material constant of the Ag, SiO2, and Si chose the Palik constant. The distribution of the silver array chose the hexagonal lattice array. The thickness of the bottom Si was set as 5 µm to ensure perfect absorption of the light. The transmission detector was used to determine the color splitting ability of the arrays by recording the transmission power on the surface of Si substrate, so the detector was set at 5 below the interface of Si - SiO2 (in the Si). A mesh grid with a maximum element size of 2 was defined in the simulations.
2.2Fabrication and characterization
The proposed MSP was fabricated on p-n junction silicon wafer. In the P-N junction, the resistivity of P-type and N-type silicon is 0.4 Ω•cm and 0.0055 Ω•cm. Firstly, the P-N wafer was cleaned by ultrasonic in acetone, isopropyl alcohol and deionized water for 15 minutes, respectively. A 100 nm layer Al film was deposited on the back and surface (with a mask plate) of the P-N wafer by thermal evaporation as electrodes. The 130 nm SiO2 layer was deposited on the surface of P-type silicon by System 100 Plasma Enhanced Chemical Vapor Deposition (PECVD). Then, an approximately 300nm thick layer of PMMA-A4 resist was covered over the wafer by spinner. The designed Hexagonal-Lattice nanodisk arrays were subsequently patterned by the Raith (eline plus) electron beam lithography (EBL) tool. After developing, the silver layer was deposited to fill the structures by Ei-5z Electron Beam Evaporation (EBE). Afterwards, the sample was placed in acetone with 6 hours in the room temperature for lift-off. The sample was cleaned in isopropyl alcohol and dried with nitrogen gas. Finally, the electrodes were led out by ultrasonic aluminum wire welder for following characterization.
The morphology of the device was characterized by high-resolution scanning electron microscope (SEM, FEI-Quanta 200).
3. Design and simulation
The schematic diagram of a single channel is shown in Fig. 1(a). The channel consistsed of a nanodisk array, optical cavity, p-n junction and electrode structure. The source and the drain electrodes are Al contacting with the Si wafer. The Al-Si photodetector is based on a band-gap engineering approach to charge trapping that utilizes two metal-semiconductor heterojunctions to form a Schottky junction [31,33]. The nanodisk array, set as a hexagonal-lattice distribution for ensuring the transmission spectrum, has the same intensity in an arbitrary polarization state of the incident light [34]. The thickness of optical cavity and nanodisk arrays is denoted as Toc and Tn, respectively. The period and diameter of the nanodisk are expressed by P and D respectively. Furthermore, the gap between the nanodisk is represented by W (W = P-D) (inset in Fig. 1(a)). Additionally, a SiO2 layer was added between the arrays and the P-type silicon.
Fig. 1. A silicon-based MSP featuring a sliver nanodisk array structure for colour-selective detection. (a) The schematic diagram of a single channel, the rainbow arrow represents incident light. Inset: top view of the nanodisk array. (b) Comparison of the transmission efficiencies of the channels with and without the optical cavity. The thickness of the SiO2 layer was set as 130 nm. The period and the diameter of two structures were 410 nm and 330 nm, respectively.
The three-dimensional finite-difference time domain (3D-FDTD) method was used to investigate the performance of the arrays with and without an optical cavity (see the Method section for details). The simulation results of the Nanodisk Arrays with SiO2 layer (named NAS) and Without SiO2 layer (named NAWS) are presented in Fig. 1(b). The FWHM of the NAWS and NAS is about 110 nm and 35 nm, respectively. The performance of the NAS can be significantly improved using the optical cavity substrate in comparison with the NAWS. Minimum in transmission appear when the propagation constant of kSPP matches the reciprocal vectors Gij (given by the periodicity of the array) [5,34]. The minimum λspp(2,0) coincided with the matching of the condition kSPP= G20, and it is related to the surface plasmon polaritons (SPPs) at the bottom silver/silicon (substrate) interface. (the calculation process can be found in the Supporting Information 1). The result of NAS is shown as the red curve in Fig. 1(b). We found that the transmission maxima changed owing to the difference of material contact with the bottom of the nanodisk compared to NAWS. However, the transmission spectrum of the structure with the optical cavity has a single peak and FWHM improved significantly. Further analysis shows that the peak formation of a structure with an optical cavity was mainly attributed to the coupling of the Localized Surface Plasmon Resonances (LSPRs) excited by the nanodisk array with the presence of cavity mode in the optical cavity. Moreover, the optical cavity can effectively smooth the transmission efficiency by reducing the effect of the destructive interference [33–35].
We analysed in detail the formation mechanism of the narrowband spectrum in the channel using the electric and magnetic near-field patterns. The amplitude of the electric and magnetic fields at the transmission maxima (λ = 605 nm), in the XZ-plane and XY-plane, for the NAS is displayed in the Fig. 2. Clear confinement of either the electric field (Fig. 2(a)) or the magnetic (Fig. 2(b)) in the XY-plane suggests that a strong field is localised in the nanodisk center. The phenomenon indicates the excitation of the LSPR of the nanodisk structure. The total LSPR field (α) is a combined effect of the incident field and radiation from individual nanodisks. The α is given by [12,34]
Fig. 2. Calculated electric and magnetic fields intensity of the nanodisk arrays with SiO2 layer (NAS) at 605 nm. (a) The electric field (E) and (b)magnetic field (H) in the XY-plane. The outlines drawn by the dotted line represent the location of the nanodisks in a single period. (c) The electric field (E) and (d) magnetic field (H) in the XZ-plane, the dotted lines represent the cross section of the nanodisk, SiO2 and the Si substrate where Y-axis is zero.
The electric field in the XZ-plane (Fig. 2(c)) was strongly confined in the optical cavity owing to the excitation of the resonant cavity modes, which showed coupling interaction with the plasmon resonances [33,34], therefore, it produced sharp transmission bands. In the magnetic field (Fig. 2(d)), there was a strong magnetic field at both ends of the nanodisk, however, the field decayed rapidly in the optical cavity. The localized field at the bottom of the nanodisk can pass through the SiO2 layer to silicon substrate, which was also reflected in the magnetic field in the XY-plane. Therefore, the narrow transmission spectrum is mainly attributed to the coupling of the LSPR with the cavity mode.
After analysing the formation of optical transmission, the structural parameters of the NAS structure were further optimized by numerical analysis. The FWHM decreased first and then increased owing to increasing the thickness of the SiO2 layer (Toc) (shown in Fig. 3(a)). The position of the transmission maxima remained immobile. The phenomenon fitted well with the typical optical cavity mode [28,34,35]. Figure 3(b) shows the influence of the thickness of nanodisk. As the thickness of the nanodisk increases, the volume of the nanodisk(V in Eq. (1)) also increases, so the total LSPR field (α) increases, resulting in the red shift of transmission position. The other conditions that had a strong influence on the transmission spectrum are the W and D. The Fig. 3(c) exhibits the transmission spectrum of NAS with different D and W within the same period at 410 nm. By increasing the diameter of the nanodisks, the incident light will not enter the structures because the ultrasmall gaps between nanodisks allow nothing but LSPR modes. This phenomenon makes the transmission spectrum of NAS sharper and eliminates the interference spectrum in the near infrared [36]. Figure 3(d) shows the transmission spectrum of the selected set of structural parameters. The thickness of the SiO2 layer and nanodisk array are set to be 130 nm and 120 nm, respectively. The NAS exhibited a high transmission efficiency of 70% (the maximum was 93%), and a narrow FWHM of less than 70 nm (the minimum was 35 nm). In the visible range, the proposed structure (NAS) can basically cover the entire wave band as a single transmission peak with a good tunability. Therefore, the proposed structure (NAS) can be easily designed to target the desired working wavelength accurately. At the same time, the proposed structures exhibit angular insensitivity, which are essential for imaging and sensing applications (refer to Supporting Information 2).
Fig. 3. Simulation study to analyse the dependence of the transmission spectrum on the structural parameters. (a) Influence of the thickness of a SiO2 layer. P = 410 nm, D = 330 nm and Tn =120 nm. The phenomenon fits well with the typical optical cavity mode. (b) Influence of the thickness of nanodisk. P = 410 nm D = 330 nm and Toc =130 nm. The transmission spectrum redshifted when the thickness increased due to the LSPR. (c) Influence of the diameter of the nanodisk. P = 410 nm, Toc =130 nm and Tn =120 nm. (d) Optimized the NAS structure. W = 80 nm, Toc =130 nm and Tn =120 nm.
4. Results and discussion
An MSP with eight channels integrated on a single substrate was proposed based on the numerical calculation. Figure 4(a) shows the schematic diagram of the compact MSP with eight channels. The nanodisk array excited the LSPR based on incident wavelength when the optical signals reached the surface of the photosensitive area. After that, the resonances were coupled further with the optical cavity mode to form a narrowband transmission spectrum. Finally, a wide range of P-N type photodetector is used to absorb the narrow-band spectrum (complete testing processes of the original device are presented in Supporting Information 3). The eight channels had the same structure and setup except for the size of the nanodisk array. Figure 4(a) shows the arrangement of the eight nanodisk arrays of different sizes. The details of nandisk arrays in the eight channels are listed in Table 1 (P-410 represent the array with a period and diameter of 410 nm and 330 nm, respectively).
Fig. 4. Images of the compact MSP. (a) The schematic diagram and the arrangement of the compact MSP with eight channels. (b) The top view of a single channel. The array size was approximately 50 × 50 um2, and the distance between the array and the electrode was approximately 130 um. (c) Top view of the eight channels, including nanodisk arrays, electrodes, and collector leads. (d) Top view of nanodisk arrays with different periods. The period of the eight SEM images refer to the arrangement in Fig. 4(a). Scale bar: (b)100 µm, (c) 1 mm and (d) 1 µm
Table 1. Dimensions of hexagonal silver nanodisk array
We fabricated the MSP by high-resolution electron-beam lithography (EBL) and electron beam evaporation (EBE) (details see the Methods section). Figure 4(b) displays the SEM image of a single channel, the size of the array is approximately 50 × 50 um2. Figure 4(c) shows the distribution of eight channels and electrode structures with a high integration on a single silicon substrate. Figure 4(d) shows the high SEM images of the eight nanodisk arrays with different lattice sizes. The position of the period refers to the arrangement in Fig. 4(a).
To better understand the photocurrent response of the MSP, we characterize the current-voltage (I-V) and current-time (I-T) performance of eight channels (Supporting Information 4). The results revealed that the fabrication process did not damage or change the operating mode of the original device. We measured the response of the channels at different wavelengths with -10 mV voltage bias to investigate spectral response of the photodetector. The optoelectronic measurement system is shown in the Supporting Information 5. Figure 5(a) displays the measured responsivities of eight channels ranging from 400 to 1000 nm. The response peak positions of the eight channels gradually shifted from 520 nm to 720 nm with the increasing period. The results consistent with simulation results, demonstrating that the peak position of the hexagonal lattice silver nanodisk arrays can be tuned easily by adjusting the period and diameter of the nanodisk arrays. All channels exhibit a narrow band spectral responsivity, indicating that the nanodisk arrays atop optical cavity substrate can effectively split the incident light. The measured FWHMs of the MSP are maintained at about 80 nm, which are narrower than most of previously reported FWHM [25,26,29–34].
Fig. 5. (a) Responsivity of the eight channels in the MSP with -10 mV bias voltage. The maxima responsivity redshifted with the increasing of the period. (b) For comparing with the MSP, a spectral photodetector without SiO2 layer was fabricated. The FWHMs of SPWS is much wider than MSP, indicating that the optical cavity has significant effect on the performance of the detector.
Besides, we found that the maximum responsivity of the photodetector could reach 91.5 mA/W (P-450, values are listed in Table 2), demonstrating that the MSP has a good photocurrent generation mechanism. The responsivities of the original silicon detector are also listed in Table 2 for comparison with the MSP at the same wavelength. It can be found that the ratio of responsivity of MSP to original detector remains at 0.8, indicating that most of the incident light transmitted through the proposed structured and absorbed by the detector. The high ratio is caused by various factors. First, the proposed spectral structure had high transmission after a series of simulation optimizations. Second, the proposed metasurface had a hexagonal distribution with a low polarization sensitivity, which can transmit all polarized states of incident light into the substrate (Supporting information 6).
Table 2. Comparison of responsivity of the MSP and original device
The spectral photodetector without the SiO2 layer (called SPWS) was also fabricated for comparing it with the MSP to further illustrate the influence of additional optical cavity. The size of the nanodisk array in SPWS was the same as that in the MSP. Figure 5(b) shows the responsivities of the eight channels in the SPWS. The curves show that the position of the maximum responsivity in the SPWS is redshifted with increasing period of the nanodisk arrays. This phenomenon is consistent with that in MSP, which further indicates that the tunability of the photodetector mainly depends on the structural characteristics of the nanodisk arrays., It was found by comparing the spectral responsivity of SPWS, MSP and original device that the metasurface contributed to splitting the incident light. However, the FWHM of SPWS is broader than the FWHM in the MSP. Meanwhile, we can find that the responsivity curves of MSP are smoother than that of SPWS, indicating that the addition of SiO2 layer can avoid the effect of the destructive interference. Therefore, it can be found from the numerical calculations and optimizations of experiments that the SiO2 layer plays an important role in the improving spectral response characteristics of the spectral photodetector. Therefore, the proposed design of the MSP would improve the efficiency of CMOS image sensors for the spectral detection, and provide an appropriate candidate for high-quality plasmonic photodetectors, sensing, and spectroscopy.
5. Conclusion
This paper proposes a new approach for the compact photodetector based on the hexagonal lattice silver nanodisk arrays atop optical cavity substrate for multi-spectral visible light detection. The MSP with eight channels are tested through simulations and experiments with multiple functions, including spectral separation, optical-to- electrical conversion and multi-channel detection. The MSP with a high detection sensitivity achieved a maximum responsivity of 91.5 mA·W-1 (P-450). We use several experiments to further highlight the significant effect of the optical cavity. We believe that this type of multi-spectral photodetector is a highly promising candidate method for its directly integration with CMOS devices. Additionally, the design can also be easily applied to other spectral regimes for different applications.
Funding
National Natural Science Foundation of China (61805037).
Disclosures
The authors declare no conflicts of interest.
Data availability
Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.
Supplemental document
See Supplement 1 for supporting content.
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