Abstract

The application of traditional methods for automatic focusing of micro-objectives in readout heads of measuring equipment used for control of metrological characteristics of precision optical angle-measuring structures (circular dials, rasters, and multibit graduated discs) poses significant difficulties. Application of the principle of preprogrammed focusing (prefocusing) of the micro-objective is proposed in such equipment. A functional scheme of the prefocusing subsystem of an AE.1686 circular measuring and diagnostic setup based on a Nano-OP65M linear positioning stage is considered. Experimental results obtained during a test operation of a setup with such a subsystem are presented.

© 2021 Optical Society of America

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