Abstract

We discuss a range of issues related to optimization of industrial production processes used for deposition of metal fluoride and metal oxide films on optical components. We determine the optical and performance properties of films produced for commercially manufactured equipment via high-vacuum evaporation. We find that substrate temperature, vacuum chamber residual pressure, vacuum chamber working pressure, and ion source operating mode have an effect on these characteristics.

© 2017 Optical Society of America

Production and Properties of Vacuum Evaporated Films of Thorium Fluoride

W. Heitmann and E. Ritter
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