Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Influence of multi-pulse action on the evolution of silicon microrelief under femtosecond laser irradiation

Not Accessible

Your library or personal account may give you access

Abstract

The results of numerical modeling of the process of multi-pulse femtosecond laser photoexcitation and heating of monocrystalline silicon are presented. It is shown that starting from a certain level of irradiance at pulse repetition rates of 10–1000 Hz, the structural changes in the surface that occur between pulses influence the spatiotemporal distribution of the electron plasma in the near-surface layer of the semiconductor at the time of irradiation with a subsequent pulse and thus accumulate, forming a stable surface microstructure in the irradiated region. A mechanism is proposed for the formation of a two-dimensional periodic microrelief on a silicon surface, which is based on a change in the type of a surface excited by electromagnetic waves with an increasing number of irradiating femtosecond pulses.

© 2017 Optical Society of America

PDF Article
More Like This
Optical emission generated from silicon under dual-wavelength femtosecond double-pulse laser irradiation

Anmin Chen, Ying Wang, Laizhi Sui, Suyu Li, Shuchang Li, Dunli Liu, Yuanfei Jiang, and Mingxing Jin
Opt. Express 23(19) 24648-24656 (2015)

Differences in the evolution of surface-microstructured silicon fabricated by femtosecond laser pulses with different wavelength

Yan Peng, DongSheng Zhang, HongYan Chen, Ya Wen, ShiDa Luo, Lin Chen, KeJian Chen, and YiMing Zhu
Appl. Opt. 51(5) 635-639 (2012)

Effect of irradiation pulses on the microstructure and phase composition of a NiCoCrAlY laser cladding coating under the action of a high-current pulsed electron beam

Yuxin Li, Bowen Chen, Peikang Bai, Ruibin Duan, Zhiguo Liang, Shouzheng Wei, Jie Cai, and Qingfeng Guan
Appl. Opt. 60(30) 9570-9577 (2021)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved