Table I
Aberration tolerances for a rectangular aperture, in the case of small phase errors (and an incoherently illuminated line object).
Aberration function | Corrected aberration |
---|
Δ1′ = C2w2 + C22w2l2 |
|
Δ2′ = C2w2 + C04w4 |
|
Δ3′ = C2w2 + C4(w2 + l2)2 |
|
Δ4′ = C1w + C03w3 |
|
Δ5′ = C1w + C21l2w |
|
Δ6′ = C1w + C3(w3 + l2w) |
|
Table II
Aberration tolerances for a rectangular aperture, in the case of small phase errors (and an incoherently illuminated line object).
Aberration function | Tilt or defocus coefficients | Tolerance |
---|
Δ1′ |
|
|
Δ2′ |
| |C04b4| ≤ 0.94λ |
Δ3′ |
|
|
Δ4′ |
| |C03b3| ≤ 0.47λ |
Δ5′ |
|
|
Δ6′ |
|
|
Table III
Optimum width in the corrected and uncorrected cases as given by the modified Strehl criterion.
Aberration function | Optimum width W1 in the uncorrected case | Optimum width in the corrected case |
---|
C02w2 | | 0.977[λ/C02]1/2 |
Δ1 | 1.892ρ−1/2[λ/C22]1/4 | 1.710ρ−1/2[λ/C22]1/4 |
Δ2 | 1.966[λ/C04]1/4 | 1.438[λ/C04]1/4 |
Δ3 |
|
|
Δ4 | 1.556[λ/C03]1/3 | 1.146[λ/C03]1/3 |
Δ5 | 1.490ρ−2/3[λ/C21]1/3 | 1.302ρ−2/3[λ/C21]1/3 |
Δ6 |
|
|
Table IV
Aberration tolerances for a rectangular aperture in the case of large phase errors.
Aberration function | Tilt or defocus coefficients |
---|
Δ1′ |
|
Δ2′ |
|
Δ3′ |
|
Δ4′ | C03b3(h3 − h) |
Δ5′ |
|
Δ6′ |
|
Table V
Aberration tolerances for a rectangular aperture in the case of large phase errors.
Aberration function | Tilt or defocus coefficients | Tolerance |
---|
Δ1′ |
|
|
Δ2′ |
|
|
Δ3′ |
|
|
Δ4′ | C1 = −C03b2 |
|
Δ5′ |
|
|
Δ6′ |
|
|
Table VI
Optimum width in the corrected and uncorrected cases as given by the quality factor.
Aberration function | Optimum width in the corrected case | Optimum width in the uncorrected case |
---|
Δ1 |
| 2.493(Q/C22)1/3(ρ2 + ρ4)−1/6 |
Δ2 | 2.365(Q/C04)1/3 | 1.742(Q/C04)1/3 |
Δ3 |
|
|
Δ4 | 2.115(Q/C03)1/2 | 1.727(Q/C03)1/3 |
Δ5 | 2.45(ρ2 + ρ4/5)−1/4(Q/C21)1/2 |
|
Δ6 |
|
|
Table VII
Strehl criterion Δ/λ ≪ 1; ν = C22 + 2C4; χ = C04 + C4.
H1 |
|
W1 |
|
H1* |
|
W1* |
|
Table VIII
Geometrical quality factor Δ/λ ≫ 1; ν = C22 + 2C4; χ = C04 + C4.
H2 |
|
W2 |
|
H2* |
|
W2* |
|